In order to manufacture EUV mask, it is necessary to evaluate the imaging performance of mask according to pattern type and pitch
using simulation software which emulates absorber structure. In order to minimize the mask 3D effect, research
on the material, structure and phase difference of the new absorber based on the simulation is being actively conducted.
EUV IUCC utilizes a simulation tool that simulates the actual lithography environment to evaluate the imaging performance of the mask
according to the absorber structure and provides basic data for mask structure design. In addition, we support manufacturing
through absorber deposition and etching processes and evaluate mass production applicability through chemical resistance evaluation of cleaning solutions.